ASML imec Renew Chip Tech Deal in Europe

Lithography giant ASML has extended its strategic partnership with Belgian R&D lab imec for an additional five years. The renewed agreement places a strong emphasis on enhancing semiconductor technology performance, particularly in high NA lithography, while also focusing on sustainability. This development follows the establishment of a cutting-edge lithography lab equipped with the latest technology just last year.

The collaboration between ASML and imec encompasses ASML’s entire product range, with a specific focus on advancing high-end nodes. ASML systems to be utilized include 0.55 NA EUV, 0.33 NA EUV, deep UV, immersion, YieldStar optical metrology, and HMI single- and multi-beam technologies.

Christophe Fouquet, the president and CEO of ASML, expressed, “This agreement signifies the next phase in the longstanding partnership between ASML and imec. It underscores our shared goals of developing solutions for the semiconductor industry and aligns with our strategy of investing in technology and innovation that will have broad societal benefits.”

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The tools provided by ASML will be integrated into imec’s pilot line and incorporated into the EU- and Flemish-funded NanoIC pilot line for sub-2nm R&D, contributing to the global semiconductor ecosystem. Research and development efforts will also extend to areas such as silicon photonics, memory, and advanced packaging, where imec collaborates with other pilot lines throughout Europe.

Luc Van den hove, President and CEO at imec, highlighted, “The inclusion of ASML’s complete product portfolio will enable us to expand and enhance the capabilities of our pilot line, offering the semiconductor ecosystem access to cutting-edge R&D to address the challenges posed by AI-driven technological advancements.”

An innovative aspect of the collaboration involves a substantial commitment to supporting groundbreaking ideas and initiatives within imec’s research pipeline that promote environmental sustainability. Van den Hove remarked, “Given imec’s strong emphasis on sustainable innovation, the explicit inclusion of this focus in our partnership is a valuable enhancement.”

ASML’s investment in the partnership is further bolstered by funding from the Chips Joint Undertaking and the Flemish government for the NanoIC line, as well as by the Dutch government as part of an Important Project of Common European Interest. The initiative to introduce 0.55 NA technology at imec was a component of the Next Gen-7A project (IPCEI22201).