Skywater Invests in Multibeam’s E-Beam Lithography Revival

The semiconductor industry is abuzz with excitement as Multibeam prepares to send its first production system to US foundry SkyWater Technology Inc. The system, known as the 'MB Platform,' is set to revolutionize lithography by offering full-wafer direct-write patterning capabilities with fine resolution. This marks a significant development as the industry witnesses the return of a technique that had been largely abandoned for mass production of integrated circuits (ICs).

One of the key features of the MB Platform is its maskless multi-column e-beam technology, which boasts superior performance compared to traditional optical lithography methods. Multibeam claims that the platform offers a 10x improvement in resolution over optical laser systems and a 100x advantage in terms of depth of focus and field of view. This makes it a compelling choice for applications such as advanced packaging, photonics, and rapid prototyping.

Direct-write e-beam lithography, although first explored in the 1960s, faced challenges in terms of throughput as IC complexity increased over the years. Multibeam has addressed this issue by employing multiple miniature columns that operate independently and in parallel, resulting in a throughput that is more than 100 times greater than conventional systems. This breakthrough positions the MB Platform as the highest productivity high-resolution maskless lithography system available.

The development of the MB Platform was led by industry pioneer David Lam and a team of semiconductor equipment and patterning technology experts. The system is designed for volume production and is compatible with various wafer sizes, including 150mm, 200mm, and 300mm. Multibeam's CEO, David Lam, expressed excitement about the platform's potential, highlighting its role in enabling rapid cycles of learning and cost-effective production for emerging markets like AI and edge computing.

Ken MacWilliams, president of Multibeam, emphasized the platform's significance in advanced packaging and its contribution to the industry's shift towards 'advanced integration.' With the MB Platform offering a complementary lithography solution, the semiconductor landscape is poised for further innovation and growth. Multibeam's executives are set to showcase the technology at Semicon West 2024, providing a glimpse into the future of lithography.