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Advanced 3kV High Voltage Wafer Test System for SiC and GaN

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October 10, 2024

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Keysight Technologies has recently unveiled its latest innovation in the semiconductor testing industry - the High Voltage Wafer Test System, known as the Keysight 4881HV. This cutting-edge system is designed specifically for power semiconductors and is capable of operating at voltages up to 3kV, catering to the evolving needs of semiconductor manufacturers.

Traditionally, manufacturers have had to rely on separate testers for high and low voltages when measuring wafers. However, with the increasing demand for power semiconductors driven by advancements in technology and the emergence of next-generation devices like silicon carbide (SiC) and gallium nitride (GaN), the need for a more efficient testing solution has become apparent.

The Keysight 4881HV test system streamlines the testing process for power device makers by offering a comprehensive solution that combines parametric tests up to 3kV in a single pass. This system supports both high and low voltages, enabling manufacturers to perform process control monitoring (PCM) and wafer acceptance testing (WAT) seamlessly during the manufacturing process.

One of the key features of the 4881HV is its high-voltage switching matrix (HV-SWM), which can support up to 3kV requirements and is scalable up to 29 pins. This integration with precision source measure units (SMUs) allows for flexible measurements ranging from low current down to sub-pA resolution at any pin, making it a versatile tool for power semiconductor testing.

Moreover, the HV-SWM eliminates the need for separate high-voltage and low-voltage test systems, making the testing process more efficient and reducing both the footprint and testing time required. The system is also designed to seamlessly integrate with factory automation environments through Keysight's SPECS-FA software, further enhancing the overall efficiency of the production process.

With built-in protection circuitry and machine control, the Keysight 4881HV ensures the safety of operators and equipment during high-voltage testing. The system is compliant with safety regulations, including SEMI S2 standards, providing peace of mind to users while delivering accurate and reliable test results.

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