Graphenea Semiconductor Conducts Experimental MPW Run

Universities, research and development centers, as well as startups, often find themselves in need of prototypes while working within tight budget constraints. To address this challenge, a unique service has emerged that allows these entities to access cutting-edge devices at an affordable entry point. This service operates through a mask sharing scheme, where devices with varying geometries but shared device architecture are produced using the same mask. This innovative approach ensures that each party receives the necessary devices without the burden of purchasing more than required.

Graphenea, in collaboration with the 2D Experimental Pilot Line (2D-EPL), is now offering a Multi-Project Wafer (MPW) run featuring a novel process flow. Operating within the prestigious 2D-EPL under the umbrella of the Graphene Flagship, Graphenea Semiconductor introduces a state-of-the-art process flow that aims to redefine the possibilities in device architecture and application versatility.

At the core of this groundbreaking innovation is a meticulously crafted device fabrication process flow developed by Graphenea. This versatile framework opens up opportunities for three distinct device architectures, catering to a wide range of applications from general electronics to advanced sensing and optoelectronics. Key to this advancement is the utilization of HfOx as the dielectric material, providing superior capacitive coupling and enhanced operational efficiency at lower voltages. Additionally, the incorporation of AlOx as the passivation layer enhances durability, making the devices resilient to harsh environmental conditions.

Among the three device architectures that can be implemented, the first one, DEVICE A, enables devices with backgates utilizing HfOx as the gate dielectric. The 2-Terminal Devices offer versatility in dielectric encapsulation options, serving as adaptable chemiresistors while retaining backgating capabilities through the substrate. These devices find applications in magnetic sensing, VOC detection, and gas sensing, among others.

Furthermore, the 3-Terminal Devices with Backgates provide a platform for sensitization with various materials such as dyes, quantum dots, and perovskites. This architecture allows for the creation of hybrid biosensors, where liquid gating and backgating can be alternated on the same device, opening up new possibilities for advanced sensing applications. Lastly, the 4-Terminal Devices offer a diverse range of functionalities, from Hall bar devices to integrated gas sensors with local heaters, enabling precise control over desorption phenomena on the channels for fine-tuned sensing capabilities.

Despite the experimental nature of this endeavor within the 2D EPL, Graphenea brings a wealth of experience in fabricating Graphene Field-Effect Transistors (GFETs), having successfully produced over half a million units. Leveraging this expertise, the seasoned team at Graphenea is prepared to collaborate with partners, offering valuable insights and support through direct communication channels. For those interested in pushing the boundaries of device architecture and application versatility, this partnership between Graphenea and the 2D-EPL presents an exciting opportunity to explore the forefront of innovation.