Breakthrough Impedance Matching Network for Sub-2nm Chip Fabrication

Advanced Energy Industries has unveiled a groundbreaking impedance matching network equipped with innovative algorithms and direct generator communication to enhance the precision control of plasma systems in the production of sub-2nm chips.

The NavX, developed by Advanced Energy, leverages RF synchronization for impedance matching, resulting in accelerated response times and minimized reflected power. This technology enables meticulous control of plasma characteristics essential for intricate semiconductor processes.

With the demand for next-generation semiconductor etch processes increasing, there is a critical need for advanced plasma control capabilities during rapid pulsing, frequent transitions, and longer recipes. These processes are vital for manufacturing smaller, faster, and more efficient chips with complex 3D structures like RibbonFETs and CFETs.

Specifically engineered with direct match-generator communication and ultra-fast tuning utilizing AE hardware and proprietary algorithms, Advanced Energy’s NavX matching network facilitates RF-synchronized impedance matching during multilevel pulse states. When paired with the eVerest generator, NavX completes AE’s latest RF delivery system (RFDS), enhancing the control of plasma characteristics.

According to Juergen Braun, Senior Vice President of Plasma Power Products at Advanced Energy, “Building on over 20 years of experience in developing advanced RF delivery systems for plasma processes, the NavX matching network redefines tuning speed, sophistication, and RF synchronization for precise plasma control across complex pulsing profiles.”

“The platform’s innovative selectable tuning algorithm allows impedance matching to multiple RF pulse states, instantly reducing reflected power in processes with shorter RF-on times,” Braun added.

NavX seamlessly synchronizes with the eVerest RF generator and incorporates Advanced Selectable Tuning and Velocity Tuning algorithms to optimize response speeds for pulse sequences. The system’s +/- 10% frequency span enables faster tuning and access to a wider impedance range, while maintaining tuning accuracy in multi-frequency applications through intermodulation distortion (IMD) immunity.

The NavX matching network is fully compatible with the PowerInsight by Advanced Energy IoT platform, providing quick access to high-resolution, actionable data that supports process optimization.

For more information on the NavX impedance matching network, visit Advanced Energy's website.