Nanowell FET Designed by Imec

Imec has recently introduced a groundbreaking design known as the nanowell FET, which builds upon traditional FinFET principles to enhance device sensitivity. This innovative design incorporates an additional well in the nanowire, resulting in improved performance compared to previous models. The device features a 35-40nm wide silicon FinFET with a 25nm nanowell serving as the active sensing area.

One of the key advantages of the nanowell FET is its ability to detect the binding of approximately ten short single-stranded DNA molecules within the well. This binding process produces a clear signal of 40mV, which is double the signal strength achieved by earlier FinFET devices. Additionally, the device exhibits near-ideal electrical properties, with a subthreshold swing of 66 mV/dec, indicating effective electrolyte gating within the nanowell.

The development of the nanowell FET presented several challenges, particularly in terms of material removal while maintaining the integrity of the semiconductor device. Imec's innovative processing techniques, including the use of sacrificial layers and precise material selection such as a C3N3 self-assembled monolayer coating, have played a crucial role in ensuring the reproducibility, reliability, and pioneering design of the device.

Looking ahead, Imec plans to conduct experimental verification of the nanowell FET's single-molecule detection capabilities, as well as explore applications beyond DNA sensing. The organization is also focusing on the development of nanopore FETs, which have the potential to revolutionize DNA sequencing and proteomics. These advancements underscore the growing significance of transistors in parallel biosensing at the nanoscale.

In conclusion, Imec's nanowell FET represents a significant leap forward in biosensor technology, offering enhanced sensitivity and improved performance compared to previous models. With its innovative design and near-ideal electrical properties, this device holds great promise for applications in single-molecule detection and beyond. Imec's ongoing research and development efforts in this area are poised to further advance the field of nanoscale biosensing and pave the way for future breakthroughs in semiconductor technology.