US Receives $5m for Semiconductor Metrology Equipment

The US government has recently allocated $5 million in funding to support the development of semiconductor metrology equipment by small firms. This significant investment marks the first award granted by the CHIPS Research and Development Office under the US CHIPS Act and microelectronics strategy.

Seventeen small firms have been selected to receive funding for their semiconductor metrology equipment projects through the US Small Business Innovation Research (SBIR) Programme. The purpose of these phase one awards is to finance research initiatives that explore the technical feasibility and innovative potential of new ideas and technologies.

These projects were chosen through a competitive selection process based on proposals submitted in response to a Notice of Funding Opportunity (NOFO) covering various research topics. The focus areas include critically needed measurement services, tools, and instrumentation; innovative manufacturing metrologies; novel assurance and provenance technologies; and advanced metrology research and development (R&D) testbeds.

All 17 firms that received funding will be considered for a potential SBIR Phase II award in Spring 2025, which could provide additional funding of up to $1,910,000. This continued support aims to help these small businesses scale their innovations for the commercial market and contribute to the growth of the US economy.

Under Secretary of Commerce for Standards and Technology and National Institute of Standards and Technology (NIST) Director Laurie Locascio expressed pride in supporting these small businesses. She stated, “NIST and CHIPS for America are proud to support these small businesses as they take innovations, scale them for the commercial marketplace, and boost the U.S. economy. We are happy to support the entrepreneurs with great ideas as they seek to build the next great American company.”