Irresistible Materials for Next Generation 1nm EUV

Imec and ASML have recently extended their collaboration to tackle the challenges associated with the next generation of extreme ultraviolet (EUV) technology. The development of materials to complement the multimillion-dollar EUV machines for the production of next-generation 1nm chips poses a significant hurdle. A spinout from the University of Birmingham in the UK, Irresistible Materials, has dedicated a decade to crafting a new generation of photoresist tailored for this specific application, with layers as thin as 7 atoms.

The newly appointed CEO of Irresistible Materials, Dinesh Bettadapur, brings a wealth of experience to the table, having previously served as the CEO of ASML MaskTools and worked on projects at Intel. Bettadapur emphasizes the complexity of optimizing the photoresist for EUV technology, stating, “EUV presents a huge set of challenging requirements, and there’s no easy answer to optimize the photoresist.” His strategic vision is focused on seizing the current opportunity and executing swiftly to achieve success.

Irresistible Materials initially experimented with fullerene-based materials but eventually transitioned to utilizing an organic compound that can be activated through various methods. Bettadapur explains the intricate process of balancing factors such as resolution and line width roughness, highlighting the need for tailored formulations to meet the diverse requirements of different customers and specific layers within the chip manufacturing process.

One of the key innovations introduced by Irresistible Materials is a resist material that controls acid diffusion through a chemical trap mechanism, enabling precise control over the reaction. This novel approach enhances the overall efficiency and effectiveness of the resist material, particularly in high NA lithography applications where absorption and depth of focus are critical challenges.

As the company continues to refine its formulations and collaborate closely with research institutions like imec, the focus remains on enabling multiple process nodes and addressing the evolving needs of chip manufacturers. The strategic partnerships with manufacturing partners and ongoing efforts to secure the supply chain in Europe and the US underscore the commitment of Irresistible Materials to driving innovation in the semiconductor industry.