MEMS Power Switch Showcased in Circuit Breaker Demo

Menlo Micro, a leading provider of cutting-edge MEMS technology, is currently demonstrating the remarkable capabilities of its MM9200 MEMS power switch specifically designed for circuit breaker applications.

The Menlo MM9200 represents a significant advancement in high-power SPST microelectromechanical MEMS switch technology. Launched in 2022, this innovative switch is constructed on a glass substrate, offering unparalleled reliability and efficiency in carrying high voltage and current within a compact form factor.

According to Chris Umminger, the vice president of power products at Menlo Micro, the MM9200 occupies a unique position between traditional electromechanical switches and solid-state MOSFET switches. With a low on-resistance of 10mΩ in a compact 5 x 5mm QFN form factor, the MM9200 delivers exceptional performance that rivals solid-state technology.

At the recent PCIM exhibition in Germany, Menlo Micro showcased a compelling comparison demo between the MM9200 and SiC MOSFETs, emphasizing the scalability and efficiency of MM9200 devices in a 240V AC application. Temperature and on-state resistance measurements were conducted on both boards, revealing the superior capabilities of the MM9200 in handling high current loads.

The MM9200 power switches, arranged in a configuration of 12 in parallel and 2 in series, boast a remarkable 600V breakdown capacity. In contrast, the SiC MOSFETs board faced limitations in sustaining operation beyond 52A due to temperature constraints. This highlights the robustness and reliability of the MEMS technology employed in the MM9200.

One of the key advantages of the MM9200 lies in its utilization of an all-metal alloy technology, enhancing its longevity and performance. By leveraging a semiconductor flow with wafer lithography, Menlo Micro ensures that the manufacturing process is scalable, paving the way for potential cost reductions in the future. The use of a glass substrate further underscores the scalability and reliability of this groundbreaking technology.