Melexis Introduces MEMS Sensor with Triphibian Technology

Melexis, a leading provider of micro-electronic solutions, has unveiled its latest product based on its innovative Triphibian technology. The new offering is a miniaturized MEMS pressure sensor capable of handling gas and liquid media measurement from 2 to 70 bar.

The MLX90830, as the device is called, is factory-calibrated to measure absolute pressure and deliver a proportional analogue output signal. This cost-effective module simplifies the integration of the latest electric vehicles (EVs) thermal management systems.

One of the key features of the Triphibian technology is its ability to provide accurate measurements above 5 bar while in contact with liquid. This unique capability is achieved through the device's special construction, which includes a suspended cantilever inside an SO16 package with the diaphragm at its tip.

The suspended cantilever design of the sensor offers pressure spike immunity up to 2000 bar/msec and a static burst level up to 210 bar. Additionally, the MLX90830 comes in two calibrated ranges (10 or 35 bar) to meet the specific demands of different EV thermal management systems.

Compared to rear-side exposed solutions, the MLX90830's design is inherently more robust, eliminating the pressure differential between the glass pedestal side and the wire bonding side. This design also allows the sensor to withstand frozen media, making it the first MEMS pressure sensor to offer such capability.

With its elevated accuracy and robust design, the MLX90830 outperforms existing non-MEMS-based designs. This helps optimize the efficiency of the vehicle's thermal management systems, ultimately leading to a longer range for electric vehicles.

The MLX90830 features embedded packaging, which reduces the sensor volume compared to standalone sensor modules. It includes a sensor readout circuit, digital hardware, voltage regulators, and analog output drivers. The sensor utilizes piezo-resistive elements implanted into the membrane to generate an output signal, which is then amplified and converted into a digital format. The 16-bit Digital Signal Processing (DSP) applies temperature compensation before providing the result as an analog output.

Furthermore, the MLX90830 is equipped with advanced protective mechanisms against overvoltage (above +40 V) and reverse voltage (below -40 V), making it suitable for truck applications. It has been developed as a Safety Element out of Context (SEooC) under ISO 26262, ensuring it meets the latest EV safety demands, up to ASIL B system integration.